Beijing NAURA Microelectronics Equipment Co.,Ltd.
Beijing NAURA Microelectronics Equipment Co.,Ltd.
在集成电路领域，由公司自主研发的14nm等离子硅刻蚀机、单片退火系统、LPCVD已成功进入集成电路主流代工厂；28nm Hardmask PVD、Al-Pad PVD设备已率先进入国际供应链体系；12英寸清洗机累计流片量已突破60万片大关；深硅刻蚀设备也于去年一举告捷东南亚市场。这些丰硕的市场成果，标志着中国装备企业已经实现了集成电路装备制造技术的里程碑式跨越。
在LED领域，ELEDE系列刻蚀机自2010年面市以来销售量已经超过两百余台，其中氮化镓刻蚀机在2014～2016连续三年新增市场占有率、出货量大幅提升；PSS刻蚀机一直是全球主流PSS厂家的主要机台，目前为止国内规模超卓的中图半导体公司已累计采购该机型近百台，对市场起到了有力的表率作用；自主开发的AlN缓冲层溅射设备，更是引领了全球LED行业技术发展趋势，在2016年实现 AlN Sputter的全球市场占有率提升，不仅在市场上取得了较大成功，更是在技术上一举打破了多年来本土设备商只能处于追随状态的坚冰局面！而同样面向LED芯片制造的EPEE550系列PECVD自推向市场以来，一直保持着新增市场占有率80%以上的市场业绩，稳居市场前沿。
在平板显示领域，北方华创微电子公司是国内TFT-LCD生产线的骨干设备供应商，多种产品在客户G5至G10.5各个世代TFT-LCD生产线及OLED生产线上批量应用；CELL段的ODF工艺紫外固化炉UV Cure以及Cutting工艺的Grind Cleaner等设备均在各世代生产线占据重要份额。
Beijng NAURA Microelectronics Equipment Co.,Ltd. (NAURA Microelectronics) is integrated by the related business of semiconductor equipment of original Sevenstar and all the business of original NMC.
Sevenstar was established in September 2001, and went public on Shenzhen Stock Exchange in March 2010; which is the first listed company involves integrated circuit equipment manufacturing, and also one of the main responsible units specializing in 02 National Major Scientific and Technological Projects; Cleaning System, Oxidation Furnace, LPCVD (Low pressure chemical vapor deposition), ALD (atomic layer deposition), Gas Mass Flow Controller (MFC) and more research projects are funded by the government. At present, a variety of key equipment for high-end integrated circuits has been launched into mass production. Sevenstar, which acts as the main supplier for domestic chip equipment, photovoltaic equipment, and flat panel display equipment, is entering a long-term cooperative relationship with leading customers from all over the world.
NMC was established in October 2001, and is jointly funded by Beijing Electronics Holding Co., Ltd, Beijing SevenStar Science &Technology Group, Ltd., Tsinghua University, Peking University, Institute of Microelectronics of the Chinese Academy of Sciences and Institute of Optics and Electronics of the Chinese Academy of Sciences; it is a high-tech company founded by domestic semiconductor high-end management and technical personnel and overseas experts that form the core team and focusing on high-end integrated circuit equipment. The company is committed to the development of high-end semiconductor equipment in three major categories – Etching equipment (Etch), Physical Vapor Deposition (PVD) equipment and Chemical Vapor Deposition (CVD) equipment, which is widely used in integrated circuit manufacturing, advanced packaging, light emitting diode (LED), micro-electromechanical systems (MEMS), etc. NAURA Microelectronics has gained scientific research funding from major projects of the "11th Five-Year Plan" of the Ministry of Science and Technology, such as the 863 Integrated Circuit Manufacturing Equipment and the research and development of 02 National Major Scientific and Technological Projects since its establishment. Through over 10 years of hard working, it has developed into a strong and competitive manufacturing enterprise for high-end semiconductor technology and equipment in China, with a strong market base and high customer reputation.
Since restructuring, NAURA Microelectronics has thousands of people in the central organization department and more than 50 top-end talent . Products include: Plasma Etching (Etch), Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), Oxidation/Diffusion, Cleaning System, Annealing and other semiconductor technology and equipments, as well as flat panel display manufacturing equipment, gas mass flow controller, and other core components; it is involved in integrated circuits, advanced packaging, LED, MEMS, power electronics, flat panel displays, photovoltaic cells and other semiconductor-related areas; the products are sold throughout China, Southeast Asia, Europe and the United States; it is the flagship platform for semiconductor equipment which has the most extensive domestic coverage, numerous products, large scale construction, and strong comprehensive strength.
In the field of integrated circuits, 14nm plasma silicon etching equipment, single wafer annealing system, and LPCVD that are developed independently by the company have successfully entered the mainstream factory for integrated circuitry; 28nm Hardmask PVD and Al-Pad PVD equipment have taken the lead in the international supply chain; the cumulative flow of pieces of 12 inch cleaning system has exceeded 600,000; deep silicon etching equipment was also a success in the Southeast Asian market last year. These fruitful market results by Chinese equipment companies have hit a symbolic milestone for integrated circuit manufacturing technology.
In the field of advanced packaging, the etching equipment and PVD equipment developed by NAURA Microelectronics have been widely used among the world's foremost advanced packaging enterprises. The performance of the company's advanced packaging PVD equipment is excellent, taking the lead in the world's CIS packaging enterprises; the developed TSV etching equipment has also occupied a high market share in the newly appearing markets in recent years; at the same time, Descum equipment that is used in the Bumping process has gained active attention among market watchers since its launch in 2016—NAURA will always keep abreast of market demands, and will continuously provide Microelectronics excellent products and services, in steadfast agreement with customer requirements.
In the field of LED, the sales volume of the ELEDE series of etching equipment has exceeded more than two million since its launch in 2010, in which, the market share of gallium nitride etching equipment in newly appearing markets has exceeded 80% from 2014 to 2016. Its shipment is in the top position worldwide. The PSS etching machine has been the main choice for the world's leading PSS manufacturers. Zhongtu Semiconducto, which is the largest semiconductor company in China, has consecutively purchased nearly 100 models of this kind, playing a significant role in the market. The independently developed AlN buffer layer sputtering equipment has led the trends of technology development for the global LED industry. In 2016, AlN Sputter's global market share occupied the leading position, not only achieving great success in the market, but also technically overcoming accusations that domestic equipment manufacturers are merely followers! Also, EPEE550 series PECVD manufactured for LED chips has maintained a market share of more than 80% in the emerging market since its launch, ranking the leading position stably.
With rapid growth of MEMS and emerging markets, NAURA Microelectronics' institutions and production lines, serving micro-nano manufacturing, optical communications, compound semiconductors, power devices, and some other emerging areas. The number of installed equipment has exceeded 100 units; APCVD system that is used in thin/thick film silicon epitaxy was recogniazed in the silicon epitaxy market in 2016, winning a large number of purchase orders.
In the field of photovoltaic manufacturing, the company has developed negative-pressure diffusion furnace which be used in high-performance solar cell manufacturing, gaining access to market recognition,and now become the mainstream product in the market. Most key production equipment of developed crystalline silicon cell line such as inline Wet Etching System, Batch Texturing System, Horizontal Diffusion Furnace, and PECVD have substituted the imported products.
In the field of flat panel display, NAURA Microelectronics is the backbone for equipment suppliers of the domestic TFT-LCD production line. A variety of products are applied in batch in the customer G5 to G10.5 TFT-LCD production lines and the OLED production line. UV Cure of CELL segment which adopts the ODF technique and Grind Cleaner of Cutting process occupy an important share in production lines of all generations.
Moreover, NAURA Microelectronics has several key technical advantages in gas flow measurement and control. The gas mass flow controller (MFC) is popular in Europe and America, always a leading brand in the domestic market.
In the blueprint for products built for customers in the semiconductor field, new technologies, new products and new processes are changing from generation to generation. As "NAURA" implies our products will shining like celestial beacons in the galaxy of semiconductor industry.